Ted J. Hubbard and Erik K. Antonsson
Engineering Design Research Laboratory
Division of Engineering and Applied Science
California Institute of Technology
Proceedings of the ASME Design for Manufacturing Conference, Irvine, CA, August 18-22, 1996.
A novel model is introduced to simulate the fabrication of MEMS (Micro Electro Mechanical Systems). This approach provides computationally efficient and geometrically accurate simulation results by hybridizing a geometrical and cellular approach. Existing simulation methods, including numerical and analytical models, are examined. Factors influencing simulation results, such as fabrication conditions and etching regimes, are introduced and discussed. Simulation examples are presented and non-ideal effects are considered.
It is crucial to have accurate and efficient simulators of MEMS fabrication processes to reduce the design iteration cycle and thus reduce the number of required prototypes and ultimately the cost of MEMS development. Furthermore, complex systems will require design and simulation tools in order to accurately model both fabrication and performance. The Segs method for MEMS fabrication simulation introduced here provides such a tool.