Structured Design Methods for MEMS

Papers and Abstracts:

Note: the Postcript versions include figures but not photographs.

• "Evolutionary Techniques in MEMS Synthesis"
  Hui Li and Erik K. Antonsson
  25th Biennial Mechanisms Conference, Special Session on The Mechanical Design Issues in MEMS held at the 1998 ASME Design Engineering Technical Conferences, Atlanta, GA, September, 1998.
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• "Design of MEMS via Efficient Simulation of Fabrication"
  Ted J. Hubbard and Erik K. Antonsson
  Proceedings of the ASME Design for Manufacturing Conference, Irvine, CA, August 18-22, 1996.
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• "Emergent Faces in Silicon Micromachining"
  Ted J. Hubbard and Erik K. Antonsson
  IEEE/ASME Journal of Microelectomechanical Systems, March 1994, Volume 3, Number 1, pp. 19-28.
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• "Cellular Automata in MEMS Design"
  Ted J. Hubbard and Erik K. Antonsson
  Sensors and Materials, 1997, Volume 9, Number 7, Pages 437-448.
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• "Rate Modeling in MEMS Design"
  Ted J. Hubbard and Erik K. Antonsson
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