Some etchant guidelines:

Comparison of EDP, KOH, and TMAH.

All three tend to produce similar two dimensional profiles but the 
three dimensional structure is different. In particular, the ratio 
of rates (100):(110) changes from EDP to KOH thus the (110) family is 
dominant in EDP and the (100) family is dominant in KOH.

Compensation with TMAH can be dificult since the maximum rates can vary.